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Continuous coating on-line plant

  • Type: ITO transparent and electro-conductive glass coating production line, Large scale plastic flat coating production line

  • Vacuum Chamber: Upright stainless steel

  • Vacuum Pump: Oil diffusion pump / Molecule pump/ Others

  • Ultimate Vacuum: 2x10˜3 Pa

  • Ion Cleaning system: sheet cathode/ linear ion source

  • Sputtering source: DC magnetron sputtering / RF magnetron sputtering

  • Process Gas: Gas flow control system/ Automatic pressure control system

  • Heating: Tube stainless steel heater

  • Driving system: gear-driven/ friction driven with adjustable speed

  • Electrical System: PLC automatic control with touch display screen operation / Semi-automatic PLC control with touch display screen

  • Film:Metal film/ oxide film(SiO2, TiO2) / ITO

Application

  • Large scale deposition ITO,Al, Ni, Cr etc., on glass/PMMA/PC/PET substrates

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