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Continuous coating on-line plant
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Type: ITO transparent and electro-conductive glass coating production line, Large scale plastic flat coating production line
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Vacuum Chamber: Upright stainless steel
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Vacuum Pump: Oil diffusion pump / Molecule pump/ Others
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Ultimate Vacuum: 2x10˜3 Pa
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Ion Cleaning system: sheet cathode/ linear ion source
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Sputtering source: DC magnetron sputtering / RF magnetron sputtering
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Process Gas: Gas flow control system/ Automatic pressure control system
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Heating: Tube stainless steel heater
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Driving system: gear-driven/ friction driven with adjustable speed
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Electrical System: PLC automatic control with touch display screen operation / Semi-automatic PLC control with touch display screen
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Film:Metal film/ oxide film(SiO2, TiO2) / ITO
Application
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Large scale deposition ITO,Al, Ni, Cr etc., on glass/PMMA/PC/PET substrates


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